基于HTCC工艺的电化学NO2气体传感器设计与测试
Design and test of electrochemical NO2 gas sensor based on HTCC technology
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摘要: 采用高温共烧陶瓷(HTCC)工艺,以氧化锆陶瓷、导电金属浆料、室温离子液体为主要原料,制作了一种电化学NO2气体传感器,并对该传感器电极的电化学性能、传感器的输出和响应特性等进行了研究.结果表明:实验所用室温离子液体1-丁基-3-甲基咪唑双三氟甲磺酰亚胺盐适合作为该电化学NO2传感器的电解液,适宜的工作电压为1.2 V;该传感器的检测范围为0~0.010%(体积分数)时,精度为1.5% FS;该传感器的响应时间(τ90)为25 s,优于传统腔室类电化学气体传感器.
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关键词:
- HTCC工艺 /
- 电化学NO2气体传感器 /
- 离子液体 /
- 响应特性
Abstract: An electrochemical NO2 gas sensor was fabricated by using high temperature co-fired ceramic (HTCC) process with zirconia ceramics, conductive metal paste and room temperature ionic liquid as the main raw materials.The electrochemical performance of the sensor electrode and the output and response characteristics of the sensor were studied. The results showed that the room temperature ionic liquid 1-butyl-3-methylimidazolium bis-trifluoromethylsulfonyl imide salt used in the experiment was suitable as the electrolyte of the electrochemical NO2 gas sensor, and the suitable working voltage was 1.2 V; when the detection range of the sensor was 0~0.010% (volume fraction), and the accuracy was 1.5% FS. The response time (τ90) of the sensor was 25 s, which was superior to the traditional chamber electrochemical gas sensor. -
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