[1] HONG J W,QUAKE S R.Integrated nanoliter systems[J].Nature Biotechnology,2003,21(10):1179.
[2] ARACI I E,QUAKE S R.Microfluidic very large scale integration (mVLSI) with integrated micromechanical valves[J].Lab on a Chip,2012(12):2803.
[3] SACKMANN E K,FULTON A L,BEEBE D J.The present and future role of microfluidics in biomedical research[J].Nature,2014,507(7491):181.
[4] THORSEN T,MAERKL S J,QUAKE S R.Microfluidic large-scale integration[J].Science,2002,298(5593):580.
[5] LIU X,LI S.An electromagnetic microvalve for pneumatic control of microfluidic systems[J].Journal of Laboratory Automation,2014,19(5):444.
[6] ANJEWIERDEN D,LIDDIARD G A,GALE B K.An electrostatic microvalve for pneumatic control of microfluidic systems[J].Journal of Micromechanics and Microengineering,2012,22(2):025019.
[7] 王福军.计算流体动力学分析[M].北京:清华大学出版社,2004.
[8] HOLZBOCK W G.Electromagnetic actuator servo valves[C]//Proceedings of the Forth National Fluid Power Systems and Controls Conference.[S.l.]:[s.n.],1977.
[9] 李松晶,刘旭玲,贾伟亮.气动电磁电磁微阀的仿真研究[J].液压与气动,2013(7):6.
[10] 丁玉红.一种小型直流电磁铁的结构设计[J].机电元件,2008,28(4):34.
[11] 张振,章巧芳.高压喷嘴的射流仿真研究[J].机电工程,2013,30(2):185.
[12] BINTORO J S,HESKETH P J.An electromagnetic actuated on/off microvalve fabricated on top of a single wafer[J].Journal of Micromechanics and Microengineering,2005(15):1157.
[13] NGUYEN T T.One-cycle-controlled PWM for on-off valve and pneumatic actuation system[D].Irvine:University of California,2005.