三极性静电吸附阵列的结构优化及分析
Optimization and analysis of the structure of tripolar electrostatic adhesion array
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摘要: 针对现有静电吸附方式吸附力不足问题，根据静电吸附阵列电场的分布特性构建了三极性静电吸附模型；然后基于有限元分析方法，以静电吸附阵列吸附力输出最大化为目的，对影响静电吸附阵列吸附力的电极间隙、电极宽度和绝缘层厚度等参数进行了优化设计.实验结果与有限元仿真具有很好的一致性，验证了三极性结构设计的有效性.在实际设计过程中，在满足电极之间击穿特性及绝缘层表面耐磨特性的前提下，应减小电极宽度和绝缘层厚度，增加电极对数，从而增加电极阵列的总体边缘长度，从而提高静电吸附阵列的吸附力.Abstract: The tripolar electrostatic adhesion model was proposed based on the characteristic of the electric field distribution of the electrostatic aolhesion array for deficiency of existing electrostatic adhesion methods.The finite element analysis method was used to optimize the electrode gap,electrode width and the thickness of insulation layer of the electrostatic aolhesion array for maximal adhesion force output.Experimental results and finite element simulation had good consistency, to verify the effectiveness of the tripolar structure design.In the actual design process, in meet the breakdown characteristics between the electrode and wear-resisting properties of insulation layer surface, it should reduce the electrode width and the thickness of insulating layer, increase the number of electrodes, so as to increase the overall length of the edge of the electrode array to improve the adsorption force of electrostatic adsorption array.
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