气动微流控芯片PDMS电磁微阀设计与性能研究
Design and characterization study on PDMS electromagnetic microvalve for pneumatic lab-on-a-chip
-
摘要: 针对常规电磁阀和阀组结构复杂、尺寸巨大,很难与微流控芯片进行集成的问题,采用新型阀体材料高弹PDMS,设计了一种新型电磁微阀.通过Fluent软件嵌入UDF函数对典型驱动压力下不同阀口开度电磁微阀的静、动态流量特性进行数值仿真,并对开关和脉冲宽度调制(PWM)两种模式下电磁微阀流量特性进行了实验研究,结果表明:在驱动频率相等的情况下,电磁微阀流量与压差呈正比;当压差一定时,电磁微阀流量与驱动频率呈反比,电磁微阀平均流量与占空比呈正比;电磁微阀出口流量与阀口开度呈正比.所设计的电磁微阀流量控制精度高、封装成本低,能够提高微流控芯片的集成化程度和控制性能.Abstract: Inview of the complicated structure and the large size of the regular electromagnetic valve and valve block and the difficulty in their integration with micro-fluidic chip, a new type of the electromagnetic microvalve was designed using PDMS, a new type of valve body.The numerical simulation of the static and dynamic flow rate characteristics of the electromagnetic microvalves with different valve-openings was made by Fluent software with UDF function under typical driving pressure.And experiment was made on the flow characteristics of electromagnetic microvalves under On-Off model and PWM model. The results showed that under the same driving pressure, electromagnetic valve flow was proportional to its pressure difference; under the same pressure difference, the average flow of electromagnetic valve was inversely proportional to its driving frequency and its opening flow was proportional to its duty cycle. The designed electromagnetic microvalve had high flow control precision, low cost of encapsulation and could improve the integration and control of pneumatic micro-fluidic chip.
-
-
[1]
HONG J W,QUAKE S R.Integrated nanoliter systems[J].Nature Biotechnology,2003,21(10):1179.
-
[2]
ARACI I E,QUAKE S R.Microfluidic very large scale integration (mVLSI) with integrated micromechanical valves[J].Lab on a Chip,2012(12):2803.
-
[3]
SACKMANN E K,FULTON A L,BEEBE D J.The present and future role of microfluidics in biomedical research[J].Nature,2014,507(7491):181.
-
[4]
THORSEN T,MAERKL S J,QUAKE S R.Microfluidic large-scale integration[J].Science,2002,298(5593):580.
-
[5]
LIU X,LI S.An electromagnetic microvalve for pneumatic control of microfluidic systems[J].Journal of Laboratory Automation,2014,19(5):444.
-
[6]
ANJEWIERDEN D,LIDDIARD G A,GALE B K.An electrostatic microvalve for pneumatic control of microfluidic systems[J].Journal of Micromechanics and Microengineering,2012,22(2):025019.
-
[7]
王福军.计算流体动力学分析[M].北京:清华大学出版社,2004.
-
[8]
HOLZBOCK W G.Electromagnetic actuator servo valves[C]//Proceedings of the Forth National Fluid Power Systems and Controls Conference.[S.l.]:[s.n.],1977.
-
[9]
李松晶,刘旭玲,贾伟亮.气动电磁电磁微阀的仿真研究[J].液压与气动,2013(7):6.
-
[10]
丁玉红.一种小型直流电磁铁的结构设计[J].机电元件,2008,28(4):34.
-
[11]
张振,章巧芳.高压喷嘴的射流仿真研究[J].机电工程,2013,30(2):185.
-
[12]
BINTORO J S,HESKETH P J.An electromagnetic actuated on/off microvalve fabricated on top of a single wafer[J].Journal of Micromechanics and Microengineering,2005(15):1157.
-
[13]
NGUYEN T T.One-cycle-controlled PWM for on-off valve and pneumatic actuation system[D].Irvine:University of California,2005.
-
[1]
-

计量
- PDF下载量: 93
- 文章访问数: 3639
- 引证文献数: 0